R&D100 2008 Entry: Silicon Micromachined Dimensional Calibration Artifact for Mesoscale Measurement Machines
SAND 2008-2227P Designed to help improve measurement accuracy for miniaturized devices, such as fuel injectors, watch components, and inkjet printer parts. The Sandia MEMS-based three-dimensional physical artifact is 10 times more accurate and much less expensive than the former gold standard and can be used to calibrate a variety of inspection systems.
8551-1 Digital Media Operations
6/10/2008 5:07:00 PM

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